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product information
    Oxygen gas control device
 >>Oxygen partial pressure control
 >>Oxygen & Atmosphere control   examination furnace
 >>H2O/O2 Free gas purifier
 >>Wet oxygen controller
    Analysis system
    A scientific-experiments device     design and manufacture
    Automatic control and
    counting system
    Microchamber

 
   Product outline  

 The temperature control from a touch panel, PC, and a network, atmosphere control, and program pattern control are possible. Moreover, it is a tubular type examination furnace corresponding to the network which can carry out feedback control to a very low-concentration oxygen-partial-pressure atmosphere by addition of an oxygen -partial-pressure controller.

   
   Feature and Function
 

 ・Program pattern operation of temperature, atmosphere, oxygen-partial-pressure, etc. is easily possible  from a touch panel and network PC by simple GUI.
 ・The oxygen-partial-pressure from high concentration (10E5Pa) to low concentration (10E-25Pa) is  very controllable by addition of an oxygen-partial-pressure control unit (option) .
 ・The atmosphere gas to an a maximum of 3 gas kind is connected, and atmospere adjustment can be  carried out in arbitrary time programs.
 ・It can respond from the Flat Zone Length of 120mm / 1 zone-system furnace to the Flat Zone Length  of 250mm / 3 zone-system furnace.

     
   Specifications and Performance    
       
Atmosphere gas line Maximum of 3 gas kind
 
Atmosphere gas flow max500SCCM  
Control oxygen-partial-pressure 10E5~10E-25Pa(option)  
Furnace caliber φ31,φ41,φ51,φ61  
Flat zone length 120~250mm  
Operating temperature Normal temperature~1150℃  
Temperature program 16step×16pattern  
The control method 1 zone control, 3 zone control  
       
 
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